Nonscanning measurements for determining in-plane mode shapes in piezoelectric devices with polished surfaces

A nonmechanical scanning method has been developed for the visualization of the in-plane mode shapes of piezoelectric devices with polished surfaces. By taking into account the reflection versus laser-wavelength characteristics of the material of the electrodes, the in-plane motion can be measured e...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 51(2004), 5 vom: 19. Mai, Seite 491-5
1. Verfasser: Watanabe, Yasuaki (VerfasserIn)
Weitere Verfasser: Goka, Shigeyoshi, Sato, Takayuki, Sekimoto, Hitoshi
Format: Aufsatz
Sprache:English
Veröffentlicht: 2004
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article