Nonscanning measurements for determining in-plane mode shapes in piezoelectric devices with polished surfaces
A nonmechanical scanning method has been developed for the visualization of the in-plane mode shapes of piezoelectric devices with polished surfaces. By taking into account the reflection versus laser-wavelength characteristics of the material of the electrodes, the in-plane motion can be measured e...
Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 51(2004), 5 vom: 19. Mai, Seite 491-5 |
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Weitere Verfasser: | , , |
Format: | Aufsatz |
Sprache: | English |
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2004
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Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
Schlagworte: | Journal Article |