Image quality improvement in a hard X-ray projection microscope using total reflection mirror optics
A new figure correction method has been applied in order to fabricate an elliptical mirror to realize a one-dimensionally diverging X-ray beam having high image quality. Mutual relations between figure errors and intensity uniformities of diverging X-ray beams have also been investigated using a wav...
Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 11(2004), Pt 4 vom: 01. Juli, Seite 343-6 |
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1. Verfasser: | |
Weitere Verfasser: | , , , , , , , , , , , |
Format: | Aufsatz |
Sprache: | English |
Veröffentlicht: |
2004
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Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
Schlagworte: | Evaluation Study Journal Article Research Support, Non-U.S. Gov't Validation Study |
Zusammenfassung: | A new figure correction method has been applied in order to fabricate an elliptical mirror to realize a one-dimensionally diverging X-ray beam having high image quality. Mutual relations between figure errors and intensity uniformities of diverging X-ray beams have also been investigated using a wave-optical simulator and indicate that figure errors in relatively short spatial wavelength ranges lead to high-contrast interference fringes. By using a microstitching interferometer and elastic emission machining, figure correction of an elliptical mirror with a lateral resolution close to 0.1 mm was carried out. A one-dimensional diverging X-ray obtained using the fabricated mirror was observed at SPring-8 and evaluated to have a sufficiently flat intensity distribution |
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Beschreibung: | Date Completed 17.08.2004 Date Revised 10.12.2019 published: Print-Electronic Citation Status MEDLINE |
ISSN: | 1600-5775 |