Estimating materials parameters in thin-film BAW resonators using measured dispersion curves
The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 51(2004), 1 vom: 14. Jan., Seite 42-51 |
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| Weitere Verfasser: | , , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2004
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |