Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes

Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes

This paper details the theory, fabrication, and characterization of a new Lamb wave device. Built using capacitive micromachined ultrasonic transducers (CMUTs), the structure described uses rectangular membranes to excite and receive Lamb waves on a silicon substrate. An equivalent circuit model for...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 50(2003), 9 vom: 11. Sept., Seite 1191-203
1. Verfasser: Badi, Mohammed H (VerfasserIn)
Weitere Verfasser: Yaralioglu, Goksen G, Ergun, A Sanli, Hansen, Sean T, Wong, Eehern J, Khuri-Yakub, Butrus T
Format: Aufsatz
Sprache:English
Veröffentlicht: 2003
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article