MEMS ultrasonic transducers for the testing of solids
Arrays of capacitive diaphragm ultrasonic transducers could potentially be used for non-destructive ultrasonic testing and structural monitoring. In this paper, we consider the efficiency of coupling of these transducers to solid media. We show that efficient coupling can be realized by using a sili...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 50(2003), 3 vom: 15. März, Seite 305-11 |
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| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2003
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article Research Support, Non-U.S. Gov't |
| Zusammenfassung: | Arrays of capacitive diaphragm ultrasonic transducers could potentially be used for non-destructive ultrasonic testing and structural monitoring. In this paper, we consider the efficiency of coupling of these transducers to solid media. We show that efficient coupling can be realized by using a silicone coating as a coupling medium. We present the results of experimental characterization of ultrasonic transducers coupled to solids in this way. We show that these transducers can be used with piezoelectric emitting transducers within the range from 1 to 5 MHz, and we demonstrate the use of several transducers as a phased array to determine the direction and distance of an ultrasonic source |
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| Beschreibung: | Date Completed 16.06.2003 Date Revised 16.09.2019 published: Print Citation Status MEDLINE |
| ISSN: | 0885-3010 |