Electrical characterization of coupled and uncoupled MEMS ultrasonic transducers
We report electrical characterization of micromachined polysilicon capacitive diaphragms for use as ultrasonic transducers. Admittance measurements yield insight into the resonant behavior and also the damping resulting from ultrasonic radiation and frictional forces caused by the etch release holes...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 50(2003), 3 vom: 15. März, Seite 297-304 |
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| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2003
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Comparative Study Evaluation Study Journal Article Research Support, Non-U.S. Gov't Validation Study Silicon Z4152N8IUI |