A micromachine high frequency ultrasound scanner using photolithographic fabrication
In this paper we describe two new types of transducer assemblies fabricated from polyimide films with photolithography that use a polyimide micromachine (MEMS) actuator to mechanically scan an ultrasound beam. Forward viewing transducers pivoting on cantilever hinges and side scanning transducers ti...
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 49(2002), 7 vom: 21. Juli, Seite 947-58 |
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| Format: | Article |
| Langue: | English |
| Publié: |
2002
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Sujets: | Journal Article Research Support, U.S. Gov't, P.H.S. Resins, Synthetic polyimide resin 39355-34-5 |