A micromachine high frequency ultrasound scanner using photolithographic fabrication
In this paper we describe two new types of transducer assemblies fabricated from polyimide films with photolithography that use a polyimide micromachine (MEMS) actuator to mechanically scan an ultrasound beam. Forward viewing transducers pivoting on cantilever hinges and side scanning transducers ti...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 49(2002), 7 vom: 21. Juli, Seite 947-58 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2002
|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article Research Support, U.S. Gov't, P.H.S. Resins, Synthetic polyimide resin 39355-34-5 |