Influence of metal thickness on phase velocity and thermal sensitivity of SAW devices
Most surface acoustic wave (SAW) devices exhibit a very small sensitivity to thermal effects. However, even on intrinsically compensated crystal cuts, the deposition of metal strips at the surface (transducers or reflectors) induces important changes in the thermoelastic properties of the device. A...
Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 48(2001), 2 vom: 18. März, Seite 538-46 |
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Format: | Aufsatz |
Sprache: | English |
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2001
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Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
Schlagworte: | Journal Article |