Decomposition of ethylene oxide in the RF plasma environment

A radio frequency (RF) plasma system was used to decompose the ethylene oxide (EO) contained gas in the EO/Ar, and EO/O2/Ar system, respectively. The reactants and final products were analyzed by using FTIR (Fourier transform infrared spectroscopy). The effects of plasma operational parameters, incl...

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Détails bibliographiques
Publié dans:Environmental technology. - 1993. - 22(2001), 2 vom: 12. Feb., Seite 165-73
Auteur principal: Liao, W T (Auteur)
Autres auteurs: Lee, W J, Chen, C Y, Shih, M
Format: Article
Langue:English
Publié: 2001
Accès à la collection:Environmental technology
Sujets:Journal Article Research Support, Non-U.S. Gov't Air Pollutants, Occupational Disinfectants Water 059QF0KO0R Carbon Dioxide 142M471B3J Argon 67XQY1V3KH plus... Carbon 7440-44-0 Ethylene Oxide JJH7GNN18P Oxygen S88TT14065
Description
Résumé:A radio frequency (RF) plasma system was used to decompose the ethylene oxide (EO) contained gas in the EO/Ar, and EO/O2/Ar system, respectively. The reactants and final products were analyzed by using FTIR (Fourier transform infrared spectroscopy). The effects of plasma operational parameters, including input power wattage (W), total gas flow rate (Q), feeding concentration (C) of EO and operational pressure for EO decomposition were evaluated. Due to the importance of the high-energy electrons in the RF plasma system, the EO decomposition fraction in plasma reaction increased with decreasing operational pressure, while that of thermal reaction, reported by previous investigations, increased with increasing operational pressure. However, owing to the electrophilic characteristic of oxygen atoms in the EO molecule causing the effect of electron attachment, in conditions of higher EO feeding concentration, the pressure dependence became the same for both plasma- and thermal-reaction. The EO oxidation reaction has also been investigated, the result shows that EO almost completely oxidized at 600-692 K gas temperature. The main products for the EO/Ar system are CO, CH4, C2H6, C2H4, and C2H2, and those for the EO/O2/Ar system are CO2 and H2O
Description:Date Completed 09.08.2001
Date Revised 21.11.2013
published: Print
Citation Status MEDLINE
ISSN:1479-487X