High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film

von Kusano, Yuri
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2019)

Wave Propagation Direction and c-Axis Tilt Angle Influence on the Performance of ScAlN/Sapphire-Based SAW Devices

von Kochhar, Abhay
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2016)

High-performance surface acoustic wave resonators in the 1 to 3 GHz range using a ScAlN/6H-SiC structure

von Hashimoto, Ken-ya
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2013)

Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering

von Akiyama, Morito
Veröffentlicht in: Advanced materials (Deerfield Beach, Fla.) (2009)