High-Performance SAW Resonator With Simplified LiTaO3/SiO2 Double Layer Structure on Si Substrate

von Takai, Tsutomu
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2019)

High-Performance SAW Resonator on New Multilayered Substrate Using LiTaO3 Crystal

von Takai, Tsutomu
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2017)