Journal Article bound states in the continuum terahertz terahertz metamaterials Fano Fano resonance Fano resonances Ising model YBCO active control active subwavelength photonics all-dielectric metasurface anapoles dual-channel switching electric dipoles flexible metamaterial device flexible metasurfaces germanium high quality factor, figure of merit high-temperature superconductors magnetic dipoles metamaterial-phonon coupling metamaterials nanophotonic devices optically active metadevices organic-inorganic metal halide perovskites switchable active metasurfaces terahertz metamaterial sensors terahertz modulation toroidal dipoles