Acoustically coupled thickness-mode AIN-on-Si band-pass filters--part I principle and devices

von Pan, Wanling
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2012)

Acoustically coupled thickness-mode AIN-on-Si band-pass filters--part II simulation and analysis

von Thakar, Vikram A
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2012)