Multiscale Mechanistic Insights into Green Anionic Surfactants on Chemical Mechanical Polishing Performance of C-, A-, and R-Plane Sapphire Combined Experiments and Theoretical Cal...

von Zou, Yida
Veröffentlicht in: Langmuir : the ACS journal of surfaces and colloids (2025)

Unveiling Microscopic Mechanisms of Chemical Mechanical Polishing via Multi-Scale Theoretical Calculations

von Hu, Bin
Veröffentlicht in: Journal of computational chemistry (2025)