From the Bottom-Up Toward Area-Selective Atomic Layer Deposition with High Selectivity

von Mackus, Adriaan J M
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2019)

Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation

von Singh, Joseph A
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2018)

Area-Selective Atomic Layer Deposition of In2O3:H Using a μ-Plasma Printer for Local Area Activation

von Mameli, Alfredo
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2017)