A Low Phase Jitter MEMS Oscillator With Centrally Anchored Piezoelectric Resonator for Wide Temperature Range Real-Time Clock Applications

von Sahasrabudhe, Shubham
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2025)

4H-Silicon Carbide as an Acoustic Material for MEMS

von Long, Yaoyao
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2023)