A grating-assisted resonant-cavity-enhanced optical displacement detection method for micromachined sensors

von Lee, Wook
Veröffentlicht in: Applied physics letters (2004)

Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection

von Hall, Neal A
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2003)