High-performance surface acoustic wave resonators in the 1 to 3 GHz range using a ScAlN/6H-SiC structure

von Hashimoto, Ken-ya
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2013)

Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering

von Akiyama, Morito
Veröffentlicht in: Advanced materials (Deerfield Beach, Fla.) (2009)