High-performance surface acoustic wave resonators in the 1 to 3 GHz range using a ScAlN/6H-SiC structure

par Hashimoto, Ken-ya
Publié dans: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2013)

Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering

par Akiyama, Morito
Publié dans: Advanced materials (Deerfield Beach, Fla.) (2009)