Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition

von Elliott, Simon D
Veröffentlicht in: Advanced materials (Deerfield Beach, Fla.) (2016)

Atomistic kinetic Monte Carlo study of atomic layer deposition derived from density functional theory

von Shirazi, Mahdi
Veröffentlicht in: Journal of computational chemistry (2014)

Mechanism, products, and growth rate of atomic layer deposition of noble metals

von Elliott, Simon D
Veröffentlicht in: Langmuir : the ACS journal of surfaces and colloids (2010)