Journal Article 2 grating efficiency Research Support, Non-U.S. Gov't 1 Research Support, U.S. Gov't, Non-P.H.S. 1 diffraction efficiency 1 diffraction grating 1 electromagnetic diffraction theory 1 mehr ... emission spectrometer 1 growth modeling 1 multilayer-coated blazed X-ray grating 1 multilayer-coated diffraction grating 1 soft X-ray 1 soft X-ray range 1 thin-film growth simulations 1 weniger ...