Staircase array of inclined refractive multi-lenses for large field of view pixel super-resolution scanning transmission hard X-ray microscopy

open access.

Détails bibliographiques
Publié dans:Journal of synchrotron radiation. - 1994. - 28(2021), Pt 3 vom: 01. Mai, Seite 732-740
Auteur principal: Mamyrbayev, Talgat (Auteur)
Autres auteurs: Ikematsu, Katsumasa, Takano, Hidekazu, Wu, Yanlin, Kimura, Kenji, Doll, Patrick, Last, Arndt, Momose, Atsushi, Meyer, Pascal
Format: Article en ligne
Langue:English
Publié: 2021
Accès à la collection:Journal of synchrotron radiation
Sujets:Journal Article deep X-ray lithography and electroplating inclined refractive X-ray multi-lens array pixel super-resolution scanning transmission hard X-ray microscopy