Li, K., Deng, B., Zhang, H., Yu, F., Xue, Y., Xie, C., . . . Xiao, T. (2020). Comprehensive characterization of TSV etching performance with phase-contrast X-ray microtomography. Journal of synchrotron radiation, 27(Pt 4), 1023. https://doi.org/10.1107/S1600577520005494
Style de citation ChicagoLi, Ke, Biao Deng, Haipeng Zhang, Fucheng Yu, Yanling Xue, Changqing Xie, Tianchun Ye, et Tiqiao Xiao. "Comprehensive Characterization of TSV Etching Performance with Phase-contrast X-ray Microtomography." Journal of Synchrotron Radiation 27, no. Pt 4 (2020): 1023. https://dx.doi.org/10.1107/S1600577520005494.
Style de citation MLALi, Ke, et al. "Comprehensive Characterization of TSV Etching Performance with Phase-contrast X-ray Microtomography." Journal of Synchrotron Radiation, vol. 27, no. Pt 4, 2020, p. 1023.