On obtaining high spectral resolution in extreme ultraviolet/soft X-ray monochromators operating off-plane diffraction in a divergent incident beam

When the trajectory of an incident beam is oriented parallel to the grooves of a periodic grating structure the radiation beam is diffracted off-plane orthogonal to the plane of incidence. The diffraction efficiency in this condition is very high and in a grating with a sawtooth profile it can appro...

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Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 27(2020), Pt 6 vom: 01. Nov., Seite 1499-1509
1. Verfasser: Jark, Werner (VerfasserIn)
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2020
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article aberrations diffraction grating extreme ultraviolet monochromators off-plane diffraction soft X-rays