APA Zitierstil

Sunday, D. F., Delachat, F., Gharbi, A., Freychet, G., Liman, C. D., Tiron, R., & Kline, R. J. (2019). X-ray characterization of contact holes for block copolymer lithography. Journal of applied crystallography, 52(1), .

Chicago Zitierstil

Sunday, Daniel F., Florian Delachat, Ahmed Gharbi, Guillaume Freychet, Christopher D. Liman, Raluca Tiron, und R Joseph Kline. "X-ray Characterization of Contact Holes for Block Copolymer Lithography." Journal of Applied Crystallography 52, no. 1 (2019).

MLA Zitierstil

Sunday, Daniel F., et al. "X-ray Characterization of Contact Holes for Block Copolymer Lithography." Journal of Applied Crystallography, vol. 52, no. 1, 2019.