Equivalent Circuit Model for a Large Array of Coupled Piezoelectric Micromachined Ultrasonic Transducers With High Emission Performance
In this article, an analytical equivalent circuit model is established for the piezoelectric micromachined ultrasonic transducer (PMUT) cell and array with a combination of the annular and circular diaphragms used for structural optimization and complex array design. Based on this model, a comprehen...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 68(2021), 3 vom: 21. März, Seite 718-733
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| Auteur principal: |
Xu, Tingzhong
(Auteur) |
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| Autres auteurs: |
Zhao, Libo,
Jiang, Zhuangde,
Guo, Shuaishuai,
Li, Zhikang,
Yang, Ping,
Luo, Guoxi,
Sun, Lin,
Zhang, Liangchi |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2021
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article
Research Support, Non-U.S. Gov't |
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