Design Considerations for Frequency Shifts in a Laterally Finite FBAR Sensor in Contact With the Newtonian Liquid

Mode-coupled vibrations in a thickness-shear (TSh) mode and laterally finite film bulk acoustic resonator (FBAR) with one face in contact with Newtonian (linearly viscous and compressional) liquid are investigated. With boundary conditions and interface continuity conditions, exact dispersion curves...

Description complète

Détails bibliographiques
Publié dans:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 11 vom: 21. Nov., Seite 2402-2412
Auteur principal: Zhao, Zinan (Auteur)
Autres auteurs: Wang, Bin, Qian, Zhenghua, Kuznetsova, Iren, Ma, Tingfeng, Yong, Yook-Kong
Format: Article en ligne
Langue:English
Publié: 2020
Accès à la collection:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:Journal Article