Design Considerations for Frequency Shifts in a Laterally Finite FBAR Sensor in Contact With the Newtonian Liquid
Mode-coupled vibrations in a thickness-shear (TSh) mode and laterally finite film bulk acoustic resonator (FBAR) with one face in contact with Newtonian (linearly viscous and compressional) liquid are investigated. With boundary conditions and interface continuity conditions, exact dispersion curves...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 11 vom: 21. Nov., Seite 2402-2412
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| Auteur principal: |
Zhao, Zinan
(Auteur) |
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| Autres auteurs: |
Wang, Bin,
Qian, Zhenghua,
Kuznetsova, Iren,
Ma, Tingfeng,
Yong, Yook-Kong |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2020
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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