A high-efficiency and high-spectral-resolution EUV/soft X-ray monochromator based on off-plane diffraction
The most efficient diffraction at a periodic grating structure is expected to take place when the incident radiation can be considered to have been specularly reflected off the inclined part of grooves that are positioned parallel to the trajectory of the incident beam. Very encouraging results for...
Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 27(2020), Pt 1 vom: 01. Jan., Seite 25-30 |
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Format: | Online-Aufsatz |
Sprache: | English |
Veröffentlicht: |
2020
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Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
Schlagworte: | Journal Article diffraction efficiency diffraction grating extreme-ultraviolet higher-order diffraction monochromator off-plane diffraction soft X-rays |
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