High-efficiency X-ray multilayer-coated blazed gratings with shifted boundaries
A new design for a high-efficiency multilayer-coated blazed X-ray grating with horizontal-shifted (non-conformal) boundary profiles is proposed. The investigation of the grating design is carried out using an integrated approach based on rigorous numerical calculations of light diffraction by gratin...
| Publié dans: | Journal of synchrotron radiation. - 1994. - 26(2019), Pt 5 vom: 01. Sept., Seite 1539-1545 |
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| Format: | Article en ligne |
| Langue: | English |
| Publié: |
2019
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| Accès à la collection: | Journal of synchrotron radiation |
| Sujets: | Journal Article diffraction efficiency electromagnetic diffraction theory grating efficiency growth modeling multilayer-coated blazed X-ray grating multilayer-coated diffraction grating soft X-ray range thin-film growth simulations |
| Accès en ligne |
Volltext |