Greenlay, B. A., & Zemp, R. J. (2017). Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode CMUT Arrays With a Sacrificial Release Process. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 64(1), 93. https://doi.org/10.1109/TUFFC.2016.2620425
Style de citation ChicagoGreenlay, Benjamin A., et Roger J. Zemp. "Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode CMUT Arrays With a Sacrificial Release Process." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 64, no. 1 (2017): 93. https://dx.doi.org/10.1109/TUFFC.2016.2620425.
Style de citation MLAGreenlay, Benjamin A., et Roger J. Zemp. "Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode CMUT Arrays With a Sacrificial Release Process." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 64, no. 1, 2017, p. 93.