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01000caa a22002652 4500 |
| 001 |
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| 003 |
DE-627 |
| 005 |
20250220040133.0 |
| 007 |
cr uuu---uuuuu |
| 008 |
231224s2016 xx |||||o 00| ||eng c |
| 024 |
7 |
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|a 10.1002/adma.201600415
|2 doi
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| 028 |
5 |
2 |
|a pubmed25n0867.xml
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| 035 |
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|a (DE-627)NLM260302007
|
| 035 |
|
|
|a (NLM)27174318
|
| 040 |
|
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|a DE-627
|b ger
|c DE-627
|e rakwb
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| 041 |
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|a eng
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| 100 |
1 |
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|a He, Rongrui
|e verfasserin
|4 aut
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| 245 |
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|a High Pressure Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Films and Solar Cells
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|c 2016
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| 336 |
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|a Text
|b txt
|2 rdacontent
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| 337 |
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|a ƒaComputermedien
|b c
|2 rdamedia
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| 338 |
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|a ƒa Online-Ressource
|b cr
|2 rdacarrier
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| 500 |
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|a Date Completed 17.07.2018
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|a Date Revised 30.09.2020
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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|a Thin films of hydrogenated amorphous silicon can be produced at MPa pressures from silane without the use of plasma at temperatures as low as 345 °C. High pressure chemical vapor deposition may open a new way to low cost deposition of amorphous silicon solar cells and other thin film structures over very large areas in very compact, simple reactors
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| 650 |
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|a Journal Article
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|a chemical vapor deposition
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|a flexible electronics
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|a hydrogenated amorphous silicon
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|a solar cells
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| 650 |
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|a thin films
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| 700 |
1 |
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|a Day, Todd D
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Sparks, Justin R
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Sullivan, Nichole F
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Badding, John V
|e verfasserin
|4 aut
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| 773 |
0 |
8 |
|i Enthalten in
|t Advanced materials (Deerfield Beach, Fla.)
|d 1998
|g 28(2016), 28 vom: 20. Juli, Seite 5939-42
|w (DE-627)NLM098206397
|x 1521-4095
|7 nnns
|
| 773 |
1 |
8 |
|g volume:28
|g year:2016
|g number:28
|g day:20
|g month:07
|g pages:5939-42
|
| 856 |
4 |
0 |
|u http://dx.doi.org/10.1002/adma.201600415
|3 Volltext
|
| 912 |
|
|
|a GBV_USEFLAG_A
|
| 912 |
|
|
|a SYSFLAG_A
|
| 912 |
|
|
|a GBV_NLM
|
| 912 |
|
|
|a GBV_ILN_350
|
| 951 |
|
|
|a AR
|
| 952 |
|
|
|d 28
|j 2016
|e 28
|b 20
|c 07
|h 5939-42
|