Surface reconstruction from microscopic images in optical lithography
This paper presents a method to reconstruct 3D surfaces of silicon wafers from 2D images of printed circuits taken with a scanning electron microscope. Our reconstruction method combines the physical model of the optical acquisition system with prior knowledge about the shapes of the patterns in the...
| Publié dans: | IEEE transactions on image processing : a publication of the IEEE Signal Processing Society. - 1992. - 23(2014), 8 vom: 20. Aug., Seite 3560-73 |
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| Auteur principal: | |
| Autres auteurs: | , |
| Format: | Article en ligne |
| Langue: | English |
| Publié: |
2014
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| Accès à la collection: | IEEE transactions on image processing : a publication of the IEEE Signal Processing Society |
| Sujets: | Journal Article Silicon Z4152N8IUI |
| Accès en ligne |
Volltext |