An equivalent network representation of a clamped bimorph piezoelectric micromachined ultrasonic transducer with circular and annular electrodes using matrix manipulation techniques

An electric circuit model for a clamped circular bimorph piezoelectric micromachined ultrasonic transducer (pMUT) was developed for the first time. The pMUT consisted of two piezoelectric layers sandwiched between three thin electrodes. The top and bottom electrodes were separated into central and a...

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Détails bibliographiques
Publié dans:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 9 vom: 28. Sept., Seite 1989-2003
Auteur principal: Sammoura, Firas (Auteur)
Autres auteurs: Smyth, Katherine, Kim, Sang-Gook
Format: Article en ligne
Langue:English
Publié: 2013
Accès à la collection:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:Journal Article Research Support, Non-U.S. Gov't Research Support, U.S. Gov't, Non-P.H.S.