SU-8-based nanocomposites for acoustical matching layer
SU-8, an epoxy-based photoresist, was introduced as the acoustical matching layer between silicon and water for lab-on-chip applications integrating acoustic characterization. Acoustical performances, including the acoustic longitudinal wave velocity and attenuation of the SU-8-based matching layer,...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 56(2009), 7 vom: 15. Juli, Seite 1483-9
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| Auteur principal: |
Wang, Shengxiang
(Auteur) |
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| Autres auteurs: |
Campistron, Pierre,
Carlier, Julien,
Callens-Debavelaere, Dorothée,
Nongaillard, Bertrand,
NDieguene, Assane,
Nassar, Georges,
Soyer, Caroline,
Zhao, Xingzhong |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2009
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Letter
Epoxy Compounds
Polymers
SU-8 compound
titanium dioxide
15FIX9V2JP
Silicon Dioxide
7631-86-9
Titanium
D1JT611TNE |
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