An acoustic micrometer and its application to layer thickness measurements
The principle and system of the acoustic micrometer are described. Its basic performance, with respect to the stability, accuracy, spatial resolution, and temperature dependence, is also discussed. Gold layers electroplated on substrates of 42% Ni-Fe alloy were taken as test specimens in the present...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 36(1989), 3 vom: 15., Seite 326-31 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
1989
|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |