An acoustic micrometer and its application to layer thickness measurements
The principle and system of the acoustic micrometer are described. Its basic performance, with respect to the stability, accuracy, spatial resolution, and temperature dependence, is also discussed. Gold layers electroplated on substrates of 42% Ni-Fe alloy were taken as test specimens in the present...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 36(1989), 3 vom: 15., Seite 326-31 |
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| Weitere Verfasser: | , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
1989
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |
| Zusammenfassung: | The principle and system of the acoustic micrometer are described. Its basic performance, with respect to the stability, accuracy, spatial resolution, and temperature dependence, is also discussed. Gold layers electroplated on substrates of 42% Ni-Fe alloy were taken as test specimens in the present study. The measurable range of the thickness for gold layers covered from 1 to 20 mum when a frequency range of 10-200 MHz was used. Stability and accuracy were achieved to within +/-0.2% and +/-1%, respectively |
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| Beschreibung: | Date Completed 02.10.2012 Date Revised 20.02.2008 published: Print Citation Status PubMed-not-MEDLINE |
| ISSN: | 1525-8955 |