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231223s1993 xx ||||| 00| ||eng c |
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|a pubmed25n0592.xml
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|a (DE-627)NLM177506202
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|a (NLM)18263154
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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|a Saito, M
|e verfasserin
|4 aut
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|a P(VDF-TrFE) transducer with a concave annular structure for the measurement of layer thickness
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|c 1993
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|a Text
|b txt
|2 rdacontent
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|a ohne Hilfsmittel zu benutzen
|b n
|2 rdamedia
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|a Band
|b nc
|2 rdacarrier
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|a Date Completed 02.10.2012
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|a Date Revised 11.02.2008
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|a published: Print
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|a Citation Status PubMed-not-MEDLINE
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|a A new type of transducer that measures the layer thickness at a small spot by spectroscopy is developed. It is made of piezoelectric copolymer film P(VDF-TrFE) with a concave annular structure. This transducer converges an ultrasonic wave on the specimen surface with oblique incidence. The layer thickness is estimated by means of a dip in the frequency spectrum of a reflected wave. Theoretical analysis using the angular spectrum theory and experimental evaluation of the transducer are described. The transducers operate in a frequency range from 7 MHz to 90 MHz. The output variation when the transducer scans a thin wire is in good agreement with a calculation of a line spread function. The lateral and axial resolutions estimated by the calculation of a point spread function are 0.61 lambda and 8.05 lambda, respectively
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|a Journal Article
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|a Tsukahara, Y
|e verfasserin
|4 aut
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|a Koyama, K
|e verfasserin
|4 aut
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|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 40(1993), 1 vom: 15., Seite 34-40
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnns
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|g volume:40
|g year:1993
|g number:1
|g day:15
|g pages:34-40
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|a GBV_USEFLAG_A
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|a SYSFLAG_A
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|a GBV_NLM
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|a GBV_ILN_22
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|a GBV_ILN_24
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|a GBV_ILN_350
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|a AR
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|d 40
|j 1993
|e 1
|b 15
|h 34-40
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