P(VDF-TrFE) transducer with a concave annular structure for the measurement of layer thickness

A new type of transducer that measures the layer thickness at a small spot by spectroscopy is developed. It is made of piezoelectric copolymer film P(VDF-TrFE) with a concave annular structure. This transducer converges an ultrasonic wave on the specimen surface with oblique incidence. The layer thi...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 40(1993), 1 vom: 15., Seite 34-40
1. Verfasser: Saito, M (VerfasserIn)
Weitere Verfasser: Tsukahara, Y, Koyama, K
Format: Aufsatz
Sprache:English
Veröffentlicht: 1993
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article
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245 1 0 |a P(VDF-TrFE) transducer with a concave annular structure for the measurement of layer thickness 
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520 |a A new type of transducer that measures the layer thickness at a small spot by spectroscopy is developed. It is made of piezoelectric copolymer film P(VDF-TrFE) with a concave annular structure. This transducer converges an ultrasonic wave on the specimen surface with oblique incidence. The layer thickness is estimated by means of a dip in the frequency spectrum of a reflected wave. Theoretical analysis using the angular spectrum theory and experimental evaluation of the transducer are described. The transducers operate in a frequency range from 7 MHz to 90 MHz. The output variation when the transducer scans a thin wire is in good agreement with a calculation of a line spread function. The lateral and axial resolutions estimated by the calculation of a point spread function are 0.61 lambda and 8.05 lambda, respectively 
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700 1 |a Tsukahara, Y  |e verfasserin  |4 aut 
700 1 |a Koyama, K  |e verfasserin  |4 aut 
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