P(VDF-TrFE) transducer with a concave annular structure for the measurement of layer thickness
A new type of transducer that measures the layer thickness at a small spot by spectroscopy is developed. It is made of piezoelectric copolymer film P(VDF-TrFE) with a concave annular structure. This transducer converges an ultrasonic wave on the specimen surface with oblique incidence. The layer thi...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 40(1993), 1 vom: 15., Seite 34-40 |
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| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
1993
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |