Callaghan, L. A., Lughi, V., MacDonald, N. C., & Clarke, D. R. (2006). Beam-supported AlN thin film bulk acoustic resonators. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 53(5), 1001.
Style de citation ChicagoCallaghan, Lori A., Vanni Lughi, Noel C. MacDonald, et David R. Clarke. "Beam-supported AlN Thin Film Bulk Acoustic Resonators." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 53, no. 5 (2006): 1001.
Style de citation MLACallaghan, Lori A., et al. "Beam-supported AlN Thin Film Bulk Acoustic Resonators." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 53, no. 5, 2006, p. 1001.
Attention : ces citations peuvent ne pas être correctes à 100%.