Journal Article X-ray optics Diamond-NOM Fizeau interferometry X-ray mirrors adaptive X-ray optics high-voltage power supplies synchrotron radiation Kirkpatrick–Baez mirrors Research Support, Non-U.S. Gov't VLS-PGM X-ray X-ray active optics active optics adaptive optics beam shaping bimorph bimorph deformable mirrors closed-loop controls deformable piezoelectric bimorph mirrors deterministic figuring fibre optic interferometers height error and slope error high-voltage bipolar power supplies ion beam figuring ion beam figuring (IBF) junction effect mechanically bent mirrors mirror optical metrology